MEMS processing facilities and equipment |
|
|---|---|
Category |
Manufacturer |
| Class 10000 clean room | Terra Universal |
| Spin Coater | Headway Research Inc |
| Oven | VWR |
| Programmable Furnace | Lindberg |
Microscopes and Accessories |
|
Category |
Manufacturer |
| Phase contrast microscope | Leica Microsystems |
| Inspection Microscope | Edmund Industrial Optics |
| Trinocular compound microscope | VWR |
| Programmable Furnace | Nikon |
| CCD camera (CV-S3200) | JAI Corporation |
| Programmable Syringe pump | Harvard Apparatus |
Bio Processing equipments |
|
Category |
Manufacturer |
| Autoclave | Napco Inc. |
| Centrifuge | Ivan Sorvall Inc. |
| Incubator | Lab-Line Instruments |
Instrumentation |
|
Category |
Manufacturer |
| Function Generator | Terra Universal |
| Lock-in Amplifier | Headway Research Inc |
| Laser displacement meter | VWR |
| UV Light s | Lindberg |
| DAQ board(16 channel) | National Instruments |
| DAQ board(16 channel) | Adventurer Pro |
| Dual Channel Oscilloscopes | Agilent 54622A |
| 44Khz Ultrasonicator | VWR |
| Gas Flow meter | Aalborg |
Arkansas Micro & Nano Systems Lab
Steve Tung, professor of mechanical engineering